Fluidic transport intersection

Details Fluidic transport intersection Fluidic transport intersection

B - Operations, Transporting

65

G

198/103, 201/80

B65G 51/02 (2006.01) B65G 51/03 (2006.01) H01L 21/677 (2006.01)

Patent

CA 1048958

FLUIDIC TRANSPORT INTERSECTION ABSTRACT The invention taught is an apparatus and method for providing automatic or semiautomatic interconnections and intersections in a fluidic transportation system. In particular the teaching relates to the transportation of semiconductor wafers or slices between proces- sing stations on a dual highway type system utilizing a fluidic cushion means whereby said wafers can be processed in a random manner and transported under a controlled environment dissimilar to the pro- cessing environment. However, the track and system may be constructed into a multiplicity of configurations and is not limited to a dual or single track system.

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