Fluidized bed reactor for production of high purity silicon

Details Fluidized bed reactor for production of high purity silicon Fluidized bed reactor for production of high purity silicon

C - Chemistry, Metallurgy

01

B

C01B 33/037 (2006.01) B01J 8/18 (2006.01)

Patent

CA 2753354

Methods and apparatus for the production of high purity silicon including a fluidized bed reactor with one or more protective layers deposited on an inside surface of the fluidized bed reactor. The protective layer may be resistant to corrosion by fluidizing gases and silicon-bearing gases.

L'invention porte sur des procédés et un appareil permettant la production de silicium de pureté élevée et comprenant un réacteur à lit fluidisé ayant une ou plusieurs couches protectrices déposées sur une surface interne du réacteur à lit fluidisé. La couche protectrice peut être résistante à la corrosion par des gaz de fluidisation et des gaz renfermant du silicium.

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