Fluorinated p-doped microcrystalline semiconductor alloys...

Details Fluorinated p-doped microcrystalline semiconductor alloys... Fluorinated p-doped microcrystalline semiconductor alloys...

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345/23, 204/96.3

H01L 31/04 (2006.01) C23C 16/22 (2006.01) H01L 21/205 (2006.01) H01L 29/04 (2006.01) H01L 31/0368 (2006.01) H01L 31/075 (2006.01) H01L 31/18 (2006.01) H01L 31/20 (2006.01)

Patent

CA 1226658

ABSTRACT A fluorinated, boron-doped p-type silicon-based semiconductor microcrystalline alloy containing a sufficient concentration of crystalline inclusions to improve material properties substantially and a method of preparing the alloy. Single and multiple cell photovoltaic devices including the alloy in at least one layer exposed to incoming light have improved fill factors and efficiencies.

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