Focused ion beam column

Details Focused ion beam column Focused ion beam column

H - Electricity

01

J

358/25

H01J 37/317 (2006.01) H01J 37/30 (2006.01)

Patent

CA 1214577

ABSTRACT OF THE DISCLOSURE Two lens focused ion beam column (10) has an accelerating lens (20) which carries a potential to focus a nonmagnified image of the liquid metal ion source (14) on the mass analyzer slit (26). Munro lens (36) accelerates the beam of selected ion species and demagnifies the image to provide an ion writing spot of less than about 1000 .ANG. size.

458606

Affiliated with

Also associated with

Rating

Focused ion beam column does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Focused ion beam column, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Focused ion beam column will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFCA-PAI-O-1338955