G - Physics – 01 – R
Patent
G - Physics
01
R
G01R 31/302 (2006.01) G01N 23/225 (2006.01) G01R 31/303 (2006.01) G01R 31/307 (2006.01) G06K 9/00 (2006.01) H01J 37/28 (2006.01) H01J 49/26 (2006.01)
Patent
CA 2260510
A method and system for imaging a doped layer of an IC automatically to extract information relating to dopant type is presented. The method employs a focused ion beam (FIB) system to image an exposed substrate layer or polysilicon layer of an integrated circuit. Imaging of a doped layer, results in clearly distinguishable doped regions. Automated extraction of data representative of the regions size, locations, and dopant type is also presented.
Elvidge Julia
James Dick
Ludlow Terry
Phaneuf Michael
Weaver Louise
Chipworks
Ogilvy Renault Llp/s.e.n.c.r.l.,s.r.l.
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