Force responsive transducer

G - Physics – 01 – L

Patent

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73/3

G01L 1/14 (2006.01) G01L 9/00 (2006.01)

Patent

CA 1134164

ABSTRACT A differential capacitive force responsive transducer provides a substantially linear relationship between transducer output and input varia- tions. A pressure or load to be measured is applied to one surface of a deflectable diaphragm, the opposite surface of which includes at least a pair of electrodes at different positions, such that when the diaphragm flexes there is a differential deflection of the electrodes. A substantially rigid electrode-bearing plate is secured to the electrode-bearing face of the dia- phragm by a spacer or spacers in an intermediate flexure region of the dia- phragm, to define separate capacitive elements with the diaphragm electrodes. The plate thus moves with the diaphragm, maintaining a fixed spacing at the spacer elements, but with the spacings between the elements varying in op- posite senses. With this construction, the transducer can be of low cost, small size, precision manufacture, and use readily deposited thick or thin film electrodes. Moreover the circuits may automatically be adjusted to pro- vide selected nominal zero and range values, so that the transducer can be utilized interchangeably with other transducers in mass production systems. Furthermore, the differential capacitance values obtained from a single trans- ducer directly provide digital values to a processor, by oppositely varying two variable frequency oscillators. The difference between these frequencies is generated and can be sampled to generate pulse counts during successive time intervals.

340875

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