Formation process for producing dielectric aluminum oxide films

Details Formation process for producing dielectric aluminum oxide films Formation process for producing dielectric aluminum oxide films

H - Electricity

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H01L 21/316 (2006.01) C25D 11/06 (2006.01) C25D 11/12 (2006.01) C25D 11/16 (2006.01)

Patent

CA 967505

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