Forming electrically insulating layers

Details Forming electrically insulating layers Forming electrically insulating layers

G - Physics

11

B

356/12

G11B 5/31 (2006.01) H01F 41/34 (2006.01) H01L 21/311 (2006.01) H01L 21/3213 (2006.01) H01L 21/768 (2006.01)

Patent

CA 1102922

ABSTRACT: A method of making inclined sides on a metal pattern which is grown on a substrate by electro- plating as a preliminary measure to the coating of the substrate with the metal pattern by an insulat- ing layer. The main deposition of the insulating layer by sputtering is preceded by a sputter-etch- ing step which transforms the rounded edges of the metal pattern into inclined sides. - 16 -

296501

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