Free floating shield and semiconductor processing system

Details Free floating shield and semiconductor processing system Free floating shield and semiconductor processing system

C - Chemistry, Metallurgy

23

C

C23C 16/00 (2006.01) C23C 16/44 (2006.01) C23C 16/455 (2006.01) C23C 16/54 (2006.01) H01L 21/205 (2006.01)

Patent

CA 2318147

A protective shield and a semiconductor processing system including a protective shield is provided. The shield includes a frame assembly including a pair of spaced end walls and a pair of side walls extending between and mounted to the end walls, and a plurality of shield bodies carried by the frame assembly. Each of the shield bodies includes a base having a continuous unit frame, a perforated sheet carried by said continuous frame, a plenum between the base and the perforated sheet, and a gas delivery device for delivering an inert gas to the plenum at a flow rate such that the gas diffuses through the perforated sheet.

L'invention concerne un écran protecteur et un système de traitement des semi-conducteurs comportant ledit écran. L'écran protecteur comprend un ensemble châssis constitué d'une paire de parois terminales, disposées à distance l'une de l'autre et reliées par une paire de parois latérales montées sur lesdites parois terminales, et une pluralité de corps de blindage supportés par ledit châssis. Chaque corps de blindage comprend une base comportant un châssis se présentant sous forme d'unité continue, une plaque perforée supportée par ledit châssis continu, une chambre de distribution située entre la base et la plaque perforée, et un dispositif de distribution de gaz permettant d'amener dans ladite chambre un gaz inerte à un débit tel qu'il diffuse à travers la plaque perforée.

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