Free-standing rotational rod-fed source

Details Free-standing rotational rod-fed source Free-standing rotational rod-fed source

C - Chemistry, Metallurgy

23

C

C23C 14/30 (2006.01) C23C 14/24 (2006.01)

Patent

CA 2237280

In a rotational rod-fed electron-beam evaporation source used with sublimating rod material, the ingot rod can be free-standing with respect to the crucible. This means that the side of the ingot rod near the tip of the rod does not contact a cooling crucible. In this way, the system can be operated in a defocused position of the electron beam, and the sweep of the electron beam can go over the edge of the ingot rod tip. Using these features, a substantially radial sweep of the tip of an ingot rod that sweeps over the edge can produce a substantially flat evaporation pattern on the ingot rod, producing a good utilization of the expensive ingot rod material.

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