Functional znse __te :h deposited film

H - Electricity – 01 – L

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H01L 21/36 (2006.01) H01L 21/365 (2006.01) H01L 31/0296 (2006.01) H01L 31/0392 (2006.01) H01L 31/068 (2006.01) H01L 31/18 (2006.01)

Patent

CA 1320106

ABSTRACT OF THE DISCLOSURE An improved functional ZnSe1-xTex:H film having a high doping efficiency and with no substantial change in the characteristics upon light irradiation. Said film is characterized in that the Se/Te quantitative ratio is in the range from 3:7 to 1:9 by the atom number ratio, hydrogen atoms are contained in an amount of 1 to 4 atomic % and the ratio of the crystal grain domains per unit volume is in the range from 65 to 85% by volume. There are also provided improved p-type and n-type ZnSe1-xTex:H:M films (M stands for a dopant) of high electroconductivity characterized in the foregoing way. These deposited films may be efficiently deposited even on a non-single crystal substrate made of metal, glass or synthetic resin with a high deposition rate. These films are suited for the preparation of a high functional device such as a photovoltatic element.

573473

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