Gas delivery metering tube

G - Physics – 05 – D

Patent

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Details

G05D 7/01 (2006.01) H01J 37/32 (2006.01)

Patent

CA 2308758

A gas deliverytube is provided. The gas delivery tube includes a plurality of axially aligned nested tubes wherein the innermost tube receives a gas and establishes uniform backing pressure over the length of the innermost tube and an outermost tube provides uniform flow distribution of the gases out through the gas delivery tube.

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