G - Physics – 05 – D
Patent
G - Physics
05
D
G05D 7/01 (2006.01) H01J 37/32 (2006.01)
Patent
CA 2308758
A gas deliverytube is provided. The gas delivery tube includes a plurality of axially aligned nested tubes wherein the innermost tube receives a gas and establishes uniform backing pressure over the length of the innermost tube and an outermost tube provides uniform flow distribution of the gases out through the gas delivery tube.
Desa Anthony
Hamilton Shawn
Ingle Nitin
Stoddard D. Neil
Yao Jack
Silicon Valley Group Thermal Systems Llc
Smart & Biggar
LandOfFree
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