Gas delivery systems for particle beam processing

Details Gas delivery systems for particle beam processing Gas delivery systems for particle beam processing

H - Electricity

01

J

H01J 37/30 (2006.01) H01J 37/305 (2006.01) H01J 37/317 (2006.01)

Patent

CA 2258649

Apparatus and method of an improved gas delivery system for delivering reactant material to a workpiece, such as a substrate, being operated on by a particle beam employs a shroud-type concentrator having an interior axial passage. Fluid reactant material is supplied to the axial passage for delivery to the workpiece. A particle beam can traverse the axial passage for impingement on the workpiece surface, concurrently if desired with the reactant delivery.

L'invention concerne un dispositif et un procédé améliorés pour la distribution de matériau réactif gazeux sur une pièce à usiner (par exemple, substrat) dans le cadre d'un traitement par faisceau de particules avec concentrateur de type enveloppant à passage axial interne. Un matériau réactif est introduit sous forme de fluide dans le passage axial pour le traitement prévu. Un faisceau de particules peut traverser le passage à destination de la surface de la pièce à usiner, le cas échéant en concomitance avec l'arrivée du réactif.

Affiliated with

Also associated with

Rating

Gas delivery systems for particle beam processing does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Gas delivery systems for particle beam processing, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Gas delivery systems for particle beam processing will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFCA-PAI-O-1774543