B - Operations – Transporting – 01 – J
Patent
B - Operations, Transporting
01
J
204/175
B01J 19/00 (2006.01) B01J 12/00 (2006.01) C23C 16/507 (2006.01) H01J 37/32 (2006.01) H05H 1/46 (2006.01)
Patent
CA 1064862
ABSTRACT The admission of a gas to a reaction chamber which has been previously evacuated is followed by its excitation by either a high-frequency electrostatic field or an electromagnetic field, formed by capacitor plates or a coil, respectively, which envelops the outer wall of the reaction chamber. A perforated metallic cylinder is disposed within the chamber concentrically with the long axis of the chamber and comprises the material-handling zone of the chamber. The activated gas reacts with material placed within the perforated cylinder, during which reaction inactive gas and resultant gaseous byproducts are continuously withdrawn. The construction of the chamber and the internal perforated metal- lic cylinder are such as to provide very uniform distribution of gaseous excited species throughout the entire material-processing volume within the cylinder thereby promoting very uniform chemical conversions of practical interest.
231849
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