Gas discharge laser

Details Gas discharge laser Gas discharge laser

H - Electricity

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H01S 3/03 (2006.01) B29C 39/02 (2006.01) B29C 39/40 (2006.01) B29C 67/24 (2006.01) H01S 3/22 (2006.01)

Patent

CA 1125899

D-21,472 IMPROVED GAS DISCHARGE LASER ABSTRACT OF THE DISCLOSURE The output power and efficiency of a gas discharge laser is substantially improved by the substitutuion of neon (Ne) for helium (He) as a buffer in the lasing medium. One embodiment of the invention is a pulsed excimer laser having a lasing gas com- prising a mixture of krypton (Kr) and fluorine (F2). Use of Ne with the KrF excimer lasing medium further enables advantageous utilization of corona wire pre-ionization to initiate the main discharge in this type of laser.

332330

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