Gas friction vacuum meter and method of making measuring body

Details Gas friction vacuum meter and method of making measuring body Gas friction vacuum meter and method of making measuring body

G - Physics

01

L

73/124, 73/0.5

G01L 21/24 (2006.01) G01L 27/00 (2006.01)

Patent

CA 1160471

Abstract of the Disclosure A rotary measuring body for a gas-friction vacuum meter has its surface formed with a macroscopic roughness which provides a gas-friction coefficient minimally affected by the microscopic roughness of the surface. As a result, the output signal and sensitivity of the vacuum meter is high and is less susceptible to change as a result of surface corrosion.

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