Gas sensing device and method of manufacturing same

Details Gas sensing device and method of manufacturing same Gas sensing device and method of manufacturing same

G - Physics

01

N

324/23

G01N 27/70 (2006.01) G01N 27/12 (2006.01)

Patent

CA 1123052

ABSTRACT OF THE DISCLOSURE A gas sensing device comprises a gas sensing element comprising a gas-sensitive resistive film of ultrafine particles of a suitable material deposited on the surface of a substrate of an electrical insulator formed with electrodes. In a method of manufacturing such a gas sensing device, a gas-sensitive material is evapo- rated in a gas atmosphere to provide the gas-sensitive resistive film of ultrafine particles of the material.

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