Gas sensor

G - Physics – 01 – N

Patent

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Details

G01N 27/14 (2006.01) G01N 27/12 (2006.01) G01N 27/406 (2006.01) G01N 27/407 (2006.01)

Patent

CA 2190232

An insulating glass film is formed on a heater film, and a gas sensitive film is formed on the glass film. The MgO content in the glass is kept. at 0.1 wt % or under to prevent Mg from eluting into absorbed water at low temperatures and segregating on the cathode by the detection voltage.

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