G - Physics – 01 – N
Patent
G - Physics
01
N
340/143, 340/147
G01N 27/04 (2006.01) G01N 27/12 (2006.01)
Patent
CA 1292298
27341-9 ABSTRACT OF THE DISCLOSURE Disclosed is a gas sensor, particularly, an inflammable gas sensor for detecting an inflammable gas, such as leaked natural gas. The sensor comprises an n-type metal oxide semi- conductor film, such as SnO2 film, whose resistivity varies responsive to the detection of the inflammable gas. The semi- conductor film is covered on its surface by an oxide film insulator made of an oxide such as SiO2, MnO, MnO2 and V2O5. While the inflammable gas which may contain ethanol passes through the oxide film insulator, the concentration of the more reactive ethanol decreases and as a result, the sensitivity to methane and hydrogen is improved. Also disclosed is a preferred production method of the sensor. The process involves (1) the formation of the n-type metal semiconductor film, (2) the formation of electrodes and (3) the formation of the oxide film insulator on the n-type metal semiconductor film by sputtering through an opening of a mask placed over the electrodes. The opening of the mask has a speci- fic size with respect to the thickness of the mask.
551002
Ippommatsu Masamichi
Kuroki Katsuyuki
Matsumoto Takeshi
Matsuzaka Takashi
Yakushizi Shingo
Fetherstonhaugh & Co.
Kabushiki Kaisha Toshiba
Osaka Gas Co. Ltd.
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