Gas supply device, particularly for manufacturing...

Details Gas supply device, particularly for manufacturing... Gas supply device, particularly for manufacturing...

C - Chemistry, Metallurgy

30

B

137/126, 32/23

C30B 35/00 (2006.01) C23C 16/455 (2006.01) C23C 16/44 (2006.01)

Patent

CA 1259883

ABSTRACT A device for supplying gases to a perforated vessel, particularly a boat or boats for processing semi- conductor elements by their exposure to the gases, comprises at least one tubular perforated gas manifold disposed under the perforated part of the boat and supported on a manifold raiser. The vessel is supported on two cylindrical support members which closely abut the boat and the manifolds which in turn abut the manifold raiser along the working length of the boat and the supporting members. A relatively small gas expansion cavity is thereby created between the manifold(s) and the boat which improves the manufacturing process.

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