Gate valve for vacuum processing apparatus

Details Gate valve for vacuum processing apparatus Gate valve for vacuum processing apparatus

B - Operations, Transporting

01

J

251/73

B01J 3/03 (2006.01) F16K 25/00 (2006.01) F16K 31/524 (2006.01) F16K 51/02 (2006.01)

Patent

CA 1282769

ABSTRACT OF THE DISCLOSURE A gate valve for sealing an opening in the wall of a vacuum processing chamber is disclosed. The valve includes a gate having a pair of wheels mounted on opposite ends of the gate and a curved track aligned and shaped to guide the wheels through an angle so that the plane of the gate is rotated out of the path of substrates as the gate moves between its sealing and open positions. The curvature of the track should be sufficient to rotate the gate through an angle of at least 60°, and preferably 75° to 105°, in order to minimize the dimension of the chamber normal to the direction of substrate travel.

500385

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