Getter pump module and system

Details Getter pump module and system Getter pump module and system

F - Mech Eng,Light,Heat,Weapons

04

B

F04B 37/02 (2006.01) F04B 37/14 (2006.01) H01L 21/00 (2006.01)

Patent

CA 2485918

A getter pump module includes a number of Better disks provided with axial holes, and a heating element which extends through the holes to support and heat the getter disks. The getter disks are preferably solid, porous, sintered getter disks that are provided with a titanium hub that engages the heating element. A thermally isolating shield is provided to shield the Better disks from heat sources and heat sinks within the chamber, and to aid in the rapid regeneration of the getter disks. In certain embodiments of the present invention, the heat shields are fixed, and in other embodiments the heat shield is movable. In one embodiment, a focus shield is provided to reflect thermal energy to the getter material from an external heater element and provide high pumping speeds. An embodiment of the present invention also provides for a rotating getter element to enhance getter material utilization.

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