Gimbaled micro-mirror positionable by thermal actuators

Details Gimbaled micro-mirror positionable by thermal actuators Gimbaled micro-mirror positionable by thermal actuators

G - Physics

02

B

G02B 26/08 (2006.01) B81B 3/00 (2006.01) G02B 6/35 (2006.01)

Patent

CA 2426421

A micro-mechanical device including a gimbaled micro-mirror positionable by a one or more thermal actuators. The thermal actuators are not attached to the micro-mirror. Rather, the micro-mirror is retained to the substrate by one or more gimbals. The micrometer sized thermal actuators are capable of repeatable and rapid moving the micro-mirror out-of-plane to accurately and repeatably steer a beam of light.

L'invention concerne un dispositif micromécanique comprenant un micromiroir à cardan pouvant être positionné par un ou plusieurs actionneurs thermiques. Ces actionneurs thermiques ne sont pas fixés au micromiroir, mais le micromiroir est retenu sur le substrat par un ou plusieurs cardans. Les actionneurs thermiques de dimension micrométrique sont capables de déplacer de façon rapide et répétée le micromiroir hors du plan afin de diriger de façon rapide et répétée un faisceau lumineux.

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