Glass material for use at high frequencies

Details Glass material for use at high frequencies Glass material for use at high frequencies

H - Electricity

01

L

H01L 23/498 (2006.01) C23C 14/10 (2006.01) H01L 21/768 (2006.01) H01L 23/532 (2006.01) H01L 23/66 (2006.01)

Patent

CA 2484794

The aim of the invention is to improve the high-frequency characteristics of high-frequency substrates or high-frequency conductor assemblies. To achieve this, the invention provides a glass material for producing insulation layers for high-frequency conductor assemblies. Said material is applied as a layer, in particular with a layer thickness ranging between 0.05 µm and 5 mm, with a tangent of loss angle tan.delta. in at least one frequency range above 1 GHz of less than or equal to 70*10-4.

L'objectif de l'invention est d'améliorer les propriétés hautes fréquences de substrats hautes fréquences ou d'ensembles conducteurs hautes fréquences. A cet effet, un matériau vitreux est employé pour produire des couches isolantes sur des substrats hautes fréquences ou des ensembles conducteurs hautes fréquences. Lorsqu'il est appliqué sous la forme d'une couche, qui présente en particulier une épaisseur comprise dans une plage allant de 0,05 µm à 5 µm, ce matériau vitreux présente, au moins pour une gamme de fréquences supérieures à 1 GHz, un facteur de perte (tan.delta.) inférieur ou égal à 70*10?-4¿.

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