Gravity-fed in-line continuous processing system and method

Details Gravity-fed in-line continuous processing system and method Gravity-fed in-line continuous processing system and method

C - Chemistry, Metallurgy

23

C

C23C 14/00 (2006.01) B05C 13/00 (2006.01) B05C 13/02 (2006.01) B05C 21/00 (2006.01) B65G 1/133 (2006.01) B65H 1/00 (2006.01) C23C 4/00 (2006.01) C23C 14/32 (2006.01) C23C 14/56 (2006.01) C23C 16/00 (2006.01) H01L 21/306 (2006.01)

Patent

CA 2480820

A gravity-few in-line continuous processing system (10) includes at least one processing chamber (12) disposed between a first load lock (14) and a second load lock (16). The second load lock is disposed lower than the first load lock. A first device (18) isolates the processing chamber from the first load lock. A second device (20) isolates the processing chamber from the second load lock. There is at least one track (22) through the processing chamber and the first and second load locks. The track is structured and arranged such that an article (24) slides thereon under the force of gravity. The apparatus also comprises an output tray (42), 4th device (20'), back of rotary barrel gate valves (60, 62, 64), 3rd devices (18'). The track is disposed at an angle (26) to horizontal (19).

L'invention concerne un système de traitement continu en ligne alimenté par gravité (10) qui comprend au moins une chambre de traitement (12) placée entre un premier sas de charge (14) et un second sas de charge (16). Le second sas de charge est plus bas que le premier sas de charge. Un premier dispositif (18) sépare la chambre de traitement du premier sas de charge. Un deuxième dispositif (20) sépare la chambre de traitement du second sas de charge. Au moins un rail de roulement (22) traverse la chambre de traitement ainsi que les premier et second sas de charge. Ce rail de roulement est conçu et monté de sorte qu'un article (24) glisse sous l'effet de la pesanteur. Cet appareil comprend également un plateau de sortie (42), un quatrième dispositif (20') et un troisième dispositifs (18') montés entre des robinets à vanne à barillet rotatif (60, 62, 64). Le rail de roulement est placé à un angle donné (26) par rapport à l'horizontale (19).

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