H - Electricity – 01 – L
Patent
H - Electricity
01
L
H01L 21/00 (2006.01)
Patent
CA 2535703
This invention relates to group IB-IIIA. VIA quaternary or higher alloys. More particularly, this invention relations to group IB-IIIA-VIA quaternary or pentenary alloys which are suitable for use as semiconductor films. More specifically, the invention relates to quaternary or pentenary alloys which are substantially homogeneous and are characterized by an x-ray diffraction pattern (XRD) having a main [112] peak at a 2.theta. angle (2.theta.(112)) of from 26° to 28° for Cu radiation at 40 kV, wherein a glancing incidence x-ray diffraction pattern (GIXRD) for a glancing angle of from 0.2° to 10° reflects an absolute shift in the 2.theta.(112) angle of less than 0.06°.
L'invention concerne des alliages quaternaires ou supérieurs des groupes IB-IIIA-VIa, notamment des alliages quaternaires ou pentanaires des groupes IB-IIIA-VIA utiles comme films semiconducteurs, plus particulièrement des alliages quaternaires ou pentanaires sensiblement homogènes et caractérisés par un diagramme de diffraction des rayons X (XRD) ayant une crête principale (112) à un angle 2.theta. (2.theta.¿(112)?) compris entre 26· et 28· pour le rayonnement Cu à 40kV, alors que le diagramme de diffraction des rayons X sous une incidence oblique (GIXRD) de 0,2· à 10· équivaut à un décalage absolu de l'angle 2.theta.¿(112)? de moins de 0,06·.
Smart & Biggar
University Of Johannesburg
LandOfFree
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