Growth of beta-sic thin films and semiconductor devices...

Details Growth of beta-sic thin films and semiconductor devices... Growth of beta-sic thin films and semiconductor devices...

H - Electricity

01

L

356/177, 148/3.2

H01L 21/20 (2006.01) C30B 25/02 (2006.01) C30B 33/10 (2006.01) H01L 21/365 (2006.01)

Patent

CA 1327935

GROWTH OF BETA-SiC THIN FILMS AND SEMICONDUCTOR DEVICES FABRICATED THEREON Abstract of the Disclosure Device quality thin films of Beta-SiC are epitaxially grown on substrates of Alpha-Sic.

581147

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