H02 doped w03, ultra-fast, high-sensitive hydrogen sensors

Details H02 doped w03, ultra-fast, high-sensitive hydrogen sensors H02 doped w03, ultra-fast, high-sensitive hydrogen sensors

G - Physics

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G01N 21/78 (2006.01) C23C 14/00 (2006.01) G01N 33/00 (2006.01)

Patent

CA 2408099

An ultra-fast response, high sensitivity structure for optical detection of low concentrations of hydrogen gas, comprising: a substrate; a water-doped WO3 layer coated on the substrate; and a palladium layer coated on the water-doped WO3 layer.

L'invention concerne une structure de haute sensibilité, à réponse ultra-rapide, pour la détection optique de faibles concentrations d'hydrogène gazeux, comprenant : un substrat ; une couche de WO3 dopée à l'eau, appliquée sur le substrat ; et une couche de palladium appliquée sur la couche de WO¿3? dopée à l'eau.

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