Halogen generator

Details Halogen generator Halogen generator

H - Electricity

01

S

H01S 3/036 (2006.01) C01B 7/00 (2006.01) C01B 7/01 (2006.01) C01B 7/19 (2006.01) C01B 7/20 (2006.01) H01S 3/225 (2006.01)

Patent

CA 2064198

A halogen generator which uses a material which absorbs commercially available halogen and, on being heated, releases the halogen in a very pure form, i.e. > 99.7 %. Such a generator can be used in a gas management system for an excimer laser in which the laser gas contains a halogen donor, an active rare gas and an inert gas diluent. Cleaners are provided to enable the rem- oval from the laser gas mixture of contaminants which build up in operation of the laser and the halogen gas generator is pro- vided to replace halogen lost in the contaminants and elsewhere. The generator can be operated even when the laser is in opera- tion so that a desired partial pressure of the halogen can be maintained.

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