C - Chemistry – Metallurgy – 01 – B
Patent
C - Chemistry, Metallurgy
01
B
C01B 31/02 (2006.01) G10K 11/36 (2006.01) C23C 16/26 (2006.01)
Patent
CA 2285125
The invention offers a hard carbon film and a SAW substrate that are easy to fabricate or low in manufacturing cost while virtually maintaining the quality that affects the important properties of a device that comprises the hard carbon film or the SAW substrate. The hard carbon film comprises a composite film of graphite-like diamond and carbon clusters; the composite film has a continuous crystal structure.
Fujii Satoshi
Nakahata Hideaki
Seki Yuichiro
Shikata Shinichi
Uemura Tomoki
Marks & Clerk
Sumitomo Electric Industries Ltd.
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