Hard material layer

Details Hard material layer Hard material layer

C - Chemistry, Metallurgy

23

C

C23C 14/32 (2006.01) C23C 14/28 (2006.01) H01J 37/32 (2006.01)

Patent

CA 2601722

The invention relates to a hard material layer, deposited on a workpiece (30) as a functional layer (32) by means of an arc-PVD method. Said layer is essentially embodied by an electrically insulating oxide of at least one of the metals (Me) of the transition metals of the sub-groups IV, V, VI of the periodic table and Al, Si, Fe, Co, Ni, Co, or Y and the functional layer (32) contains no noble gas or halogen.

L'invention concerne une couche de matériau solide déposée sur une pièce (30) en tant que couche fonctionnelle (32) par l'intermédiaire d'un procédé de dépôt chimique en phase vapeur à l'arc. Ladite couche est essentiellement conçue en tant qu'oxyde isolant électrique d'au moins un des métaux (Me) des métaux de transition des groupes secondaires IV, V et VI du tableau périodique et de Al, Si, Fe, Co, Ni, Y, et la couche fonctionnelle (32) ne contient ni gaz rare ni halogène.

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