Heat-conductive aluminum nitride sintered body and method of...

C - Chemistry – Metallurgy – 04 – B

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261/1, 356/143,

C04B 35/58 (2006.01) C04B 35/581 (2006.01) H01L 21/48 (2006.01) H01L 23/057 (2006.01) H01L 23/14 (2006.01) H01L 23/15 (2006.01) H05K 1/03 (2006.01)

Patent

CA 1337358

An aluminum nitride sintered body is disclosed which is mainly composed of aluminum nitride, contains 0.01 to 1.0 percent by weight of a rare earth element and 0.001 to 0.5 percent by weight of oxygen, and has thermal conductivity of at least 180 W/mK. A method of manufacturing such an aluminum nitride sintered body is also disclosed in which aluminum nitride powder is first prepared, at least one compound containing a rare earth element is homogeneously mixed with the aluminum nitride powder to a content of 0.01 to 1.0 percent by weight, based on the rare earth element. A formed body obtained by forming such mixed powder is sintered in a non- oxidizing atmosphere containing nitrogen at a temperature of 1500 to 2200°C.

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