Heater for an effusion cell

Details Heater for an effusion cell Heater for an effusion cell

C - Chemistry, Metallurgy

30

B

C30B 23/06 (2006.01) C23C 14/24 (2006.01) C30B 25/10 (2006.01) H05B 3/64 (2006.01)

Patent

CA 2090730

2090730 9203588 PCTABS00011 The invention relates to effusion cell used in Molecular Beam and Chemical Beam Epitaxy systems. Effusion cell includes a crucible (27) for source material and a heater (16, 20) for heating the crucible. According to the invention the heater (16, 20) for the crucible (27) mainly consists of two coils (16a, 16b) made of thin foil ribbons which have been corrugated to make ribbon stiffer. The foil ribbon (16a, 16b) is concave or the cross section is arched. The ribbon is placed into the grooves (35) of a holder (20). At the end of the effusion cell the corrugated foil ribbons (16a, 16b) have been interconnected by a foil ring (14) with the connecting cross-sectional area less than the cross-sectional area of the foil ribbon.

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