C - Chemistry – Metallurgy – 01 – B
Patent
C - Chemistry, Metallurgy
01
B
23/326
C01B 33/00 (2006.01) B01J 6/00 (2006.01) C01B 33/029 (2006.01)
Patent
CA 1150480
13143 IMPROVED HEATING METHOD FOR SILANE PYROLYSIS REACTOR ABSTRACT OF THE INVENTION An improved method for the pyrolysis of silane in a free-space reactor. The improved method involves non-uniform heat input along the axial length of a free-space silane pyrolysis reactor so that the axial temperature profile along the length of the surrounding reactor wall is essentially constant. S P E C I F I C A T I O N - 1 -
407996
Braaten Mark E.
Iya Sridhar K.
Lay James R.
Van Slooten Richard A.
Hopley William G.
Union Carbide Corporation
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