Heating method for silane pyrolysis reactor

Details Heating method for silane pyrolysis reactor Heating method for silane pyrolysis reactor

C - Chemistry, Metallurgy

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B

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C01B 33/00 (2006.01) B01J 6/00 (2006.01) C01B 33/029 (2006.01)

Patent

CA 1150480

13143 IMPROVED HEATING METHOD FOR SILANE PYROLYSIS REACTOR ABSTRACT OF THE INVENTION An improved method for the pyrolysis of silane in a free-space reactor. The improved method involves non-uniform heat input along the axial length of a free-space silane pyrolysis reactor so that the axial temperature profile along the length of the surrounding reactor wall is essentially constant. S P E C I F I C A T I O N - 1 -

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