Height measuring apparatus

Details Height measuring apparatus Height measuring apparatus

G - Physics

01

R

356/117

G01R 31/26 (2006.01) G01B 13/06 (2006.01)

Patent

CA 1229427

HEIGHT MEASURING SYSTEM ABSTRACT OF DISCLOSURE The invention of this disclosure is a profiling and testing system that uses an air probe to determine the contour of a wafer containing a plurality of dies so that an - electrical sensor may automatically step from die to die and test the completed dies in the wafer.

491482

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