High-capacity getter pump

H - Electricity – 01 – J

Patent

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Details

H01J 7/18 (2006.01) F04B 37/02 (2006.01)

Patent

CA 2117681

An improved high-capacity getter pump, comprising a plurality of porous sintered piled-up annuli made from a non-eva- porable getter material and having: (i) a first planar surface having a central hole; (ii) a second planar surface, having a broader central hole, parallel to said first surface and spaced therefrom by a distance "d" of 1-10.5 mm; (iii) a third intermediate planar surface, interposed between said first and second surfaces, spaced from said first surface by a thickness "t" of 0.5-5.0 mm and having a hole coincident with the hole of said first surface; wherein the first surface of a subsequent annulus is in contact with the second surface of a preceding annulus and wherein the first surface of a subsequent annulus is spaced from the third surface of a preceding annulus by a gas conductance having a height "c" of 0.5-10 mm.

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