High density area array solder microjoining interconnect...

H - Electricity – 01 – L

Patent

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Details

H01L 21/60 (2006.01) H01L 21/00 (2006.01) H01L 23/485 (2006.01) H01L 23/498 (2006.01) H05K 1/11 (2006.01) H05K 3/34 (2006.01) H05K 3/38 (2006.01)

Patent

CA 2472750

A system for interconnecting a set of device chips by means of an array of microjoints disposed on an interconnect carrier is taught. The carrier is provided with a dense array of microjoint receptacles with an adhesion layer, barrier layer and a noble metal layer; the device wafers are fabricated with an array of microjoining pads comprising an adhesion layer, barrier layer and a fusible solder layer with pads being located at matching locations in reference to the barrier receptacles; said device chips are joined to said carrier through the microjoint arrays resulting in interconnections capable of very high input/output density and inter-chip wiring density.

La présente invention concerne un système permettant d'interconnecter un ensemble de microcircuits de dispositifs au moyen d'un réseau de microjoints disposés sur un support d'interconnexion. Ce support est pourvu d'un réseau dense de réceptacles de microjoints comportant une couche d'adhésion, une couche barrière et une couche de métal noble. Les tranches des dispositifs comprennent également un réseau de pastilles de microjointure comprenant une couche d'adhésion, une couche barrière et une couche de soudure fusible, les pastilles étant disposées au niveau des emplacements correspondants par rapport aux réceptacles barrières. Ces microcircuits de dispositifs sont rattachés au support au moyen des réseaux de microjoints qui constituent des interconnexions permettant d'obtenir une densité entrée/sortie très élevée ainsi qu'une densité de câblage inter-puces très élevée.

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