H - Electricity – 01 – L
Patent
H - Electricity
01
L
352/82.4
H01L 27/10 (2006.01) H01L 21/762 (2006.01) H01L 21/8242 (2006.01) H01L 27/108 (2006.01)
Patent
CA 1248231
Abstract High Density Memory A memory cell formed in a groove or trench in a semiconductor substrate is provided which includes a storage capacitor located at the bottom and along the lower portion of the sidewalls of the trench, a bit/sense line disposed at the surface of the semiconductor substrate adjacent to the trench, a transfer device or transistor located on the sidewall of the trench between the capacitor and the bit/sense line and a field shield for electrically isolating the storage capacitor from an adjacent cell formed in the same semiconductor substrate.
517130
International Business Machines Corporation
Saunders Raymond H.
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