H - Electricity – 03 – H
Patent
H - Electricity
03
H
356/200, 333/89
H03H 9/17 (2006.01) H03H 9/58 (2006.01)
Patent
CA 1205533
HIGH-FREQUENCY PIEZOELECTRIC RESONATOR AND METHOD OF FABRICATION OF SAID RESONATOR Abstract of the Disclosure The high-frequency piezoelectric resonator comprises a quartz plate or disk having a region of reduced thickness which forms a diaphragm and is joined to the remainder of the plate or disk by means of a zone forming a step. A conductive electrode extends from the exterior of the disk or plate to the center of the thinned region and is provided with a conductive tongue constituted by a metallic film-layer of controlled thickness and disposed in the stepped zone. The method involves formation of the disk or plate by ion machining whereas the electrodes and the conductive tongue are formed by the sputtering technique.
429180
Berte Marc
Bidard Louis
Lechopier Serge
Compagnie D'electronique Et de Piezo-Electricite - C.e.p.e.
Goudreau Gage Dubuc
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