H - Electricity – 01 – J
Patent
H - Electricity
01
J
H01J 37/32 (2006.01)
Patent
CA 2522058
The invention relates to a high frequency plasma jet source (1) comprising a space (3) for accommodating a plasma, electrical means (8, 9) for applying a voltage to said high frequency plasma jet source (1) so as to ignite and obtain the plasma, means (4) for extracting a plasma jet (I) from the plasma space (3), and an outlet port which is separated from the vacuum chamber (7) by means of an extraction grid (4). The plasma jet (I) emerges from the high frequency plasma jet source (1) with essentially divergent radiation characteristics. The invention further relates to a method for irradiating a surface with a plasma jet (I) of a high frequency plasma jet source, said plasma jet (I) being divergent.
L'invention concerne une source de faisceau plasma haute fréquence (1) comprenant un compartiment de plasma (3) destiné à un plasma, des moyens électriques (8, 9) permettant d'appliquer une tension électrique à la source de faisceau plasma haute fréquence (1) afin d'amorcer et de conserver le plasma, des moyens d'extraction (4) permettant d'extraire un faisceau plasma (I) du compartiment de plasma (3) ainsi qu'un orifice de sortie qui est séparé de la chambre sous vide (7) par une grille d'extraction (4). Le faisceau plasma (I) sort de la source de faisceau plasma haute fréquence (1) avec une caractéristique de rayonnement sensiblement divergente. L'invention concerne également un procédé permettant d'exposer une surface au rayonnement du faisceau plasma (I) divergent d'une source de faisceau plasma haute fréquence.
Dennison Associates
Leybold Optics Gmbh
LandOfFree
High-frequency plasma beam source and method for the... does not yet have a rating. At this time, there are no reviews or comments for this patent.
If you have personal experience with High-frequency plasma beam source and method for the..., we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and High-frequency plasma beam source and method for the... will most certainly appreciate the feedback.
Profile ID: LFCA-PAI-O-1937412