High mobility multilayered heterojunction devices employing...

H - Electricity – 01 – L

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H01L 29/76 (2006.01) H01L 21/203 (2006.01) H01L 21/22 (2006.01) H01L 29/15 (2006.01) H01L 29/778 (2006.01)

Patent

CA 1139892

Abstract of the Disclosure The present invention relates to a high mobility semiconductor device. The device is comprised of a first plurality of narrow bandgap semiconductor layers and a second plurality of wide bandgap semiconductor layers interleaved with and contiguous with the first plurality of layers. The wide bandgap and narrow bandgap layers are substantially lattice-matched to one another so as to form substantially defect free heterojunctions at the interfaces between the layers. The layers have a conduction or valence band step of sufficient magnitude to confine carriers to the narrow bandgap layers. The layers are adapted such that the impurity-concentration-thickness product of the wide bandgap layers exceeds the impurity-concentration-thickness product of the narrow bandgap layers.

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