High overpressure low range pressure sensor

Details High overpressure low range pressure sensor High overpressure low range pressure sensor

G - Physics

01

L

G01L 19/06 (2006.01) G01L 7/08 (2006.01) G01L 9/00 (2006.01)

Patent

CA 2141688

A low range pressure sensor includes a base plate of brittle material, and a diaphragm plate assembly mounted on the base plate and sealed around a periphery to the base plate. Pressures are introduced to cause a center diaphragm section to deflect toward the base plate, and the deflection of the diaphragm is sensed through strain gauges to provide an indication of the pressure. The diaphragm is provided with a plurality of individual support posts on a side facing the base plate so that when the diaphragm is deflected toward the base plate under high over-pressures the support posts will support the diaphragm against movement to avoid failure or breakage of the diaphragm. The number of support posts can be varied as desired. In a preferred form of the invention, the base plate is provided with a very thin layer of silicon dioxide, which is a good electrical insulator and which also serves to help accomodate slight movement of the support posts as they touch the surface of the base plate to reduce stress buildup in the diaphragm as the overpressure increases.

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