High performance micro-fabricated electrostatic quadrupole lens

Details High performance micro-fabricated electrostatic quadrupole lens High performance micro-fabricated electrostatic quadrupole lens

H - Electricity

01

J

H01J 49/06 (2006.01) B81B 7/02 (2006.01) H01J 49/42 (2006.01) H01L 21/02 (2006.01)

Patent

CA 2625251

This invention provides a method of aligning sets of cylindrical electrodes in the geometry of a miniature quadrupole electrostatic lens, which can act as a mass filter in a quadrupole mass spectrometer. The electrodes are mounted in pairs on microfabricated supports, which are formed from conducting parts on an insulating substrate. Complete segmentation of the conducting parts provides low capacitative coupling between co-planar cylindrical electrodes, and allows incorporation of a Brubaker prefilter to improve sensitivity at a given mass resolution. A complete quadrupole is constructed from two such supports, which are spaced apart by further conducting spacers. The spacers are continued around the electrodes to provide a conducting screen.

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