High purity fluid delivery system

G - Physics – 05 – D

Patent

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Details

G05D 7/06 (2006.01) F16K 7/04 (2006.01) F16L 55/10 (2006.01) G01L 7/08 (2006.01) G01L 9/12 (2006.01) G01F 1/84 (2006.01) G01L 19/14 (2006.01)

Patent

CA 2700634

A recirculating fluid distribution system, comprising a fluid reservoir; a distribution conduit recirculating fluid through the fluid distribution system; a plurality of tool drops providing fluid from the reservoir to tools attached to the tool drops; a flow control device; a Coriolis mass flowmeter in fluid communication with the flow control device and the distribution conduit, the Coriolis flowmeter having a flow-tube of a high-purity plastic material and providing a output signal; a pressure transmitter in fluid communication with the Coriolis mass flowmeter and with the distribution conduit, the pressure transmitter providing an output signal; a controller receiving a setpoint signal, the controller receiving the output signals from the Coriolis flowmeter and the pressure transmitter and providing a control output signal to the flow control device, wherein the flow control device output varies in response to the control output signal to maintain a predetermined pressure and flow rate in the distribution conduit; a plurality of tool drop flow control devices, each in-line with a respective tool drop; and a plurality of tool drop Coriolis mass flowmeters, each in-line with a respective tool drop and each having a flow-tube made of a high-purity plastic material, and each providing an output signal; wherein the controller receives the output signals from the tool drop Coriolis mass flowmeters and provides control signals to the tool drop flow control devices.

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