High purity fluid delivery system

Details High purity fluid delivery system High purity fluid delivery system

G - Physics

01

F

G01F 1/84 (2006.01) G05D 7/06 (2006.01)

Patent

CA 2464051

A fluid delivery system includes a flow control device and a Coriolis mass flowmeter(112) in fluid communication with the flow control device.(110).The Coriolis flowmeter has a flow-tube made of a high-purity plastic material, such as PFA, making the delivery system suitable for high purity applications. A controller (114)provides a control output signal to the flow control device(110), which may comprise a pinch valve(120), so as to vary the flow control device output in response to a setpoint signal and measurement signals received from the flowmeter.(112).

La présente invention concerne un système de distribution de liquide. Ledit système comprend un dispositif de régulation de débit et un débitmètre massique de Coriolis (112) en communication fluidique avec le dispositif de régulation de débit (110). Le débitmètre de Coriolis présente un tube d'écoulement constitué de plastique de grande pureté, tel qu'un PFA, rendant le système de distribution approprié pour des applications de grande pureté. Un contrôleur (114) fournit un signal de sortie de commande au dispositif de régulation de débit (110), lequel peut comprendre un robinet à manchon (120), de manière à faire varier la sortie du dispositif de régulation de débit en réponse à un signal prédéterminé et de signaux de mesure provenant du débitmètre (112).

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