High purity gas delivery assembly

Details High purity gas delivery assembly High purity gas delivery assembly

F - Mech Eng,Light,Heat,Weapons

16

K

251/87

F16K 25/00 (2006.01) F16K 41/10 (2006.01)

Patent

CA 2006331

ABSTRACT The invention relates to a high purity gas delivery control assembly (100) having straight through gas flow. The bellows (118) which operates a gas flow interruption means (114) is isolated during gas flow and dead volumes are reduced to a minimum. This prevents the introduction of unwanted particles into the gas streams.

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