High-purity molybdenum target and high-purity molybdenum...

Details High-purity molybdenum target and high-purity molybdenum... High-purity molybdenum target and high-purity molybdenum...

H - Electricity

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L

356/172

H01L 29/40 (2006.01) C22B 34/34 (2006.01) H01L 21/28 (2006.01) H01L 21/285 (2006.01) H01L 29/49 (2006.01)

Patent

CA 1221475

ABSTRACT There is provided a high-purity molybdenum target or high- purity molybdenum silicide target for LSI electrodes which comprises a high-purity metallic molybdenum having an alkali metal content of not more than 100 ppb and a radioactive element content of not more than 10 ppb. Further, a process is provided for producing such target comprising a wet purification processing followed by a series of dry processings.

459984

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