High purity, siliconized silicon carbide having high thermal...

Details High purity, siliconized silicon carbide having high thermal... High purity, siliconized silicon carbide having high thermal...

C - Chemistry, Metallurgy

04

B

C04B 35/565 (2006.01) C04B 35/573 (2006.01) H01L 21/02 (2006.01)

Patent

CA 2361050

This invention is a high strength, thermal shock resistant, high purity siliconized silicon carbide material made from siliconizing a converted graphite SiC body having at least 71 vol% silicon carbide therein.

Cette invention est un matériau en carbure de silicium siliconé à haute résistance, résistant aux chocs thermiques et de grande pureté, obtenu par siliconage d'un corps SiC à graphite converti contenant au moins 71 % en volume de carbure de silicium.

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