High ratio planetary drive system for vacuum chamber

Details High ratio planetary drive system for vacuum chamber High ratio planetary drive system for vacuum chamber

C - Chemistry, Metallurgy

23

C

C23C 14/24 (2006.01) B05C 9/06 (2006.01) B05C 21/00 (2006.01) B05D 1/00 (2006.01) C23C 14/34 (2006.01) F16H 1/36 (2006.01)

Patent

CA 2059094

A high ratio planetary drive system, a vacuum processing chamber system incorporating the planetary drive system, and a method of operating the system are disclosed. The planetary drive system provides relatively slow planetary workpiece rotation for effecting processing (deposition and reaction) of thin films, in particular, optical thin films, with complete film oxidation, controlled film uniformity, reduced bearing wear and reduced heat dissipation.

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