High resolution electromechanical translation device

Details High resolution electromechanical translation device High resolution electromechanical translation device

H - Electricity

01

J

310/2

H01J 37/28 (2006.01) H01L 41/09 (2006.01)

Patent

CA 2013034

ABSTRACT OF THE DISCLOSURE The electromechanical translation apparatus includes a translation drive assembly having front and rear drive leg members coupled together with central extension piezoelectric members, and piezoelectric clamping members which clamp the drive leg members between opposing bearing members of a lower base. The translation drive assembly may directly carry an object for precise positioning of the object, or may carry an upper movable base which in turn may be translated along an axis perpendicular to the direction of movement along the lower base, so that an object placed upon the upper movable base can be precisely positioned.

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